TriBeam systems are engineered to simultaneously acquire angular/energy-selective secondary-electron and BSE data, thanks to their special in-lens detectors ... The FIB column represents the primary ...
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Two of the previous major microscopes (SEM/FIB and Tecnai F20) were sold or retired. The feasibility of electron holography with the Osiris STEM, and electrical probing with the Helios SEM/FIB both ...